MAKHABAYEVA, A.T.; CHIRKOVA, L.V.; GUCHENKO, S.A.; TULEUOV, S.D.; Makhanov K.М.; SHAKIRZYANOV, R.I.; AFANASYEV, D.A. INVESTIGATION OF OPTICAL AND ELECTRICAL PROPERTIES OF TITANIUM OXYNITRIDE FILMS. Eurasian Physical Technical Journal, [S. l.], v. 22, n. 4 (54), p. 24–30, 2025. DOI: 10.31489/2025N4/24-30. Disponível em: https://phtj.buketov.edu.kz/EPTJ/article/view/1311. Acesso em: 1 apr. 2026.