BERDIBEKOV, A.T.; LAURINAS, V.Ch.; DOLYA, A.V.; GRUZIN, V.V.; GUCHENKO, S.A.; TVARDOVSKY, A.N. MAGNETRON SPUTTERING OF PROTECTIVE COATINGS ON PARTS OF SURFACES OF PRODUCTS AND TOOLS USING MULTIELEMENT TARGETS MANUFACTURED USING A NEW TECHNOLOGY. Eurasian Physical Technical Journal, [S. l.], v. 19, n. 3(41), p. 34–38, 2022. DOI: 10.31489/2022No3/34-38. Disponível em: https://phtj.buketov.edu.kz/EPTJ/article/view/361. Acesso em: 3 mar. 2026.