Berdibekov, A.T., V.Ch. Laurinas, A.V. Dolya, V.V. Gruzin, S.A. Guchenko, and A.N. Tvardovsky. “MAGNETRON SPUTTERING OF PROTECTIVE COATINGS ON PARTS OF SURFACES OF PRODUCTS AND TOOLS USING MULTIELEMENT TARGETS MANUFACTURED USING A NEW TECHNOLOGY”. Eurasian Physical Technical Journal 19, no. 3(41) (October 13, 2022): 34–38. Accessed March 3, 2026. https://phtj.buketov.edu.kz/EPTJ/article/view/361.