Utamuradov S, Daliev S, Rakhmanov D, Doroshkevich A, Genov I, Tuan P, et al. PROCESSES OF DEFECT FORMATION IN SILICON DIFFUSIONALLY DOPED WITH PLATINUM AND IRRADIATED WITH PROTONS. Eurasian phys. tech. j. [Internet]. 2023 June 17 [cited 2026 Nov. 5];20(3(45):35-42. Available from: https://phtj.buketov.edu.kz/EPTJ/article/view/766