ELECTRICAL PROPERTIES OF SILICON NANOWIRES UNDER AMMONIA ADSORPTION CONDITIONS
DOI:
https://doi.org/10.31489/2020No1/54-58Keywords:
silicon, nanowires, electrical properties, metal-assisted chemical etching, current-voltage characteristics, sensorAbstract
When monitoring the environment, measurements of the concentration and composition of the gas phase of various substances are of great importance. To solve such problems, resistive-type semiconductor sensors are of interest. The proposed sensors based on silicon nanowires have several advantages: high sensitivity and possibility to work at room temperature. This in turn simplifies the design and reduces the cost of the sensors. All this indicates the relevance of the investigated gas sensor.
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