Исследование оптических и электрических свойств пленок оксинитрида титана.
Авторы
DOI:
https://doi.org/10.31489/2025N4/24-30Ключевые слова:
оксинитрид титана, тонкие пленки, магнетронное напыление, спектр поглощения, электрическое сопротивлениеАннотация
В данной работе были получены пленки оксинитрида титана на поверхности стеклянных и кремниевых подложек методом магнетронного напыления в смеси газов аргон-кислород-азот. Толщина полученных пленок, скорость их осаждения и морфология поверхности были оценены в зависимости от типа подложки. Были изучены оптические и электрические свойства пленок, полученных на поверхности стекла. Сравнение оптических данных с литературными показало образование аморфных пленок с составом, близким к стехиометрическому составу TiO1.27N0.49. Результаты показали, что полученные свойства соответствуют литературным данным, что открывает новые перспективы для использования полученных пленок оксинитрида титана в качестве активного элемента мемристоров, а также в других важных областях современного материаловедения.
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