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MAGNETRON SPUTTERING OF PROTECTIVE COATINGS ON PARTS OF SURFACES OF PRODUCTS AND TOOLS USING MULTIELEMENT TARGETS MANUFACTURED USING A NEW TECHNOLOGY
- A.T. Berdibekov
- V.Ch. Laurinas
- A.V. Dolya
- V.V. Gruzin
- S.A. Guchenko
- A.N. Tvardovsky
34-38
Abstract views: 587 / PDF downloads: 269

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