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  • INVESTIGATION OF OPTICAL AND ELECTRICAL PROPERTIES OF TITANIUM OXYNITRIDE FILMS

    • A.T. Makhabayeva
    • L.V. Chirkova
    • S.A. Guchenko
    • S.D. Tuleuov
    • K.М. Makhanov
    • R.I. Shakirzyanov
    • D.A. Afanasyev
    24-30
    2025-12-29
    Abstract views: 203 / PDF downloads: 58
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