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• MAGNETRON SPUTTERING OF PROTECTIVE COATINGS ON PARTS OF SURFACES OF PRODUCTS AND TOOLS USING MULTIELEMENT TARGETS MANUFACTURED USING A NEW TECHNOLOGY

  • A.T. Berdibekov
  • V.Ch. Laurinas
  • A.V. Dolya
  • V.V. Gruzin
  • S.A. Guchenko
  • A.N. Tvardovsky

  34-38

  Abstract views: 587 / PDF downloads: 269

• INVESTIGATION OF OPTICAL AND ELECTRICAL PROPERTIES OF TITANIUM OXYNITRIDE FILMS

  • A.T. Makhabayeva
  • L.V. Chirkova
  • S.A. Guchenko
  • S.D. Tuleuov
  • K.М. Makhanov
  • R.I. Shakirzyanov
  • D.A. Afanasyev

  24-30

  2025-12-29

  Abstract views: 397 / PDF downloads: 110